HIC(혼성집적회로)란,
Base substrate | Al2O3, AlN, BeO |
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Conductors | Au, Pt/Au Ag, Pd/Ag, Pt/Ag Pt/Pd/Ag |
Dielectrics | Glass-ceramics, recrystallizing glasses |
Resistors | RuO2 doped glass |
Processes | Sequentially print, dry, and fire conductor, Dielectric, and resistor pastes |